GMS

Veeco’s Precision Gas Mixing System generates gas mixtures with improved concentration control for tighter process control and higher yield. Active control of mixture concentration compensates for changes or drifts in upstream concentration. For example: out of a 1 percent dopant premix, the Piezocon Precision Gas Mixing System can generate a 50ppm dopant gas mixture with a ± 0.5ppm or better concentration control, tank to tank and over the shelf life of the tank.