MS Flow Meter for Corrosive Gases

Mass Flow Meters and Controllers

Our most versatile gas mass flow meters and controllers for most industrial processes and research applications.

• 98 pre-loaded gas calibrations – switch without losing accuracy
• Measures mass flow, volumetric flow, temperature, and pressure
• Laminar differential pressure (DP) mass flow measurement technology
• Ultra-fast response time as low as 30 ms
• 0.01-100% measurement and control range (10,000:1 turndown)

FULL SCALE FLOW RANGES = 0.5 SCCM – 10,000 SLPM

OPERATING PRESSURE RANGE = 11.5 – 320 PSIA