PIEZOCON The Piezocon® Gas Concentration Sensor/Delivery Control System has become a standard within the semiconductor equipment industry for accurate monitoring and reproducible delivery control of chemical precursor vapors and of dopant gases to CVD, ALD and MOCVD process tools.
Mfr Part #:

PIEZOCON

Mfr Name: Veeco
Veeco
Description:
The Piezocon® Gas Concentration Sensor/Delivery Control System has become a standard within the semiconductor equipment industry for accurate monitoring and reproducible delivery control of chemical precursor vapors and of dopant gases to CVD, ALD and MOCVD process tools.
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PIEZOCON Specifications Quick View

Most important parameters for selection – full specs in datasheet.
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